Surface Inspection Equipment×ジャステム - List of Manufacturers, Suppliers, Companies and Products

Wafer Surface Inspection Machine (VSI-01 Type)

This is a device for surface inspection of wafers after polishing.

- Detects foreign particles of φ0.2μm or larger using a scattered light detection method. - Uses vacuum suction on the backside, ensuring no contact with the wafer surface.

• Company：ジャステム
• Price：Other

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment